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Wafer Thickness

Metal Contamination

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Adhesion

ULTra low-K CVD Film

 

 

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82-31-205-5163

  
 

 


   

  What is targos?

   
Application Environment designed to:
§ gather
§ analyze
§ visualize and
§ forward  

   
data around the fab

   
It differs from other S/W-Products through:
§ its modular design (Libraries, SnapIN¡¯s, Extensions)
§ advanced client / server architecture in pure JAVA
§ considerable automation of routine engineering tasks
 
   
More Information...

PRODUCT


 

- targoss in production in 6 DRAM fabs worldwide + Logic

-
Reticle Management System (already deployed in 2 fabs)

- 2nd Generation CIM Framework
- Total CD/ETCH Control Solution
 

 

  Address  ¡µ¡·
 

4th F/L, Manwol Bldg, 1022-4, Youngtong-Dong, Youngtong-Gu, Suwon-Si, Kyunggi-Do, 442-470
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